Year of Production 2001 2006 2012 ------------------------------------------------------------------------------------------------------- Line width (nm) 150 100 50 ------------------------------------------------------------------------------------------------------- Air Critical Particle Size (nm) 8 2 1 ------------------------------------------------------------------------------------------------------- Water oxidizable carbon (ppb) 1 <1 <1 ------------------------------------------------------------------------------------------------------- Water Dissolved Oxygen (ppb) 1-10 1 1 ------------------------------------------------------------------------------------------------------- Water Particle>critical size <0.2 per ml <0.2 per ml <0.2 per ml ------------------------------------------------------------------------------------------------------- Liquid Particles>critical size <0.5 per ml <0.5 per ml <0.5 per ml ------------------------------------------------------------------------------------------------------- HCl, H2O impurities (ppt) <1000 <1000 <1000 ------------------------------------------------------------------------------------------------------- BEOL solvents K, Li, Na (ppt each) <1000 <1000 <1000 ------------------------------------------------------------------------------------------------------- POU Gases particles (per liter) 2 2 2
表5.35 SIA Roadmap Projections (Micro October 1998 p.54)
