Agilent G1960-80303 真空规离子硅，用于6100/5975

Agilent G1960-80303 真空规离子硅，用于6100/5975

Since one week my Micro Ion E Gauge (Agilent G3170-80001) has a problem. The indicator-LED keeps switching between green and red. The high vacuum pressure shown on the front-LCD of my 5975C switches between 9.99e+09 Torr and the measured value. The foreline pressure is at a constant and good level.

Looks like the Gauge works fine but not permanently. Any suggestions on how to fix this? Rebooting the system had no impact.