全新原装HORIBA质量流量计 SEC-Z514MGX 氮气3SLM

Z514, Z524 DevicenetTM

Mass Flow Controller / Meter

Mass flow controller model *1 SEC-Z514KX SEC-Z514MGX SEC-Z524MGXN SEC-Z524MGX

Mass flow meter model *1 SEF-Z514KX SEF-Z514MGX SEF-Z524MGXN SEF-Z524MGX

Full-scale flow rate MR/MG number

(N2 conversion flow rate) #R01:10SCCM

#R1.5:17.5SCCM

#01:30SCCM

#1.5:55SCCM

#02:100SCCM

#2.5:175SCCM

#03:300SCCM

#3.5:550SCCM

#04:1SLM

#4.5:1.75SLM

#05:3SLM

#5.5:5.5SLM

#06:10SLM