D*线（显影蚀刻连退膜线）

甲)流程

         入板Þ显影Þ冲污水、溢流水洗(1)(2)(3)(4)Þ清水洗、吸干Þ检查(1)Þ蝕刻(1)Þ蝕刻(2)Þ溢流水洗(5) (6)(7)Þ清水洗、吸干Þ检查(2)Þ膨松Þ退膜Þ冲污水、溢流水洗(8)(9)(10)、清水洗、吸干Þ强风吹干及热风吹干Þ冷却出板

(乙)基本規格

          1)    外呎吋:                        20743.5mmLx1922mmWx2440&plu*n;25mmH

          2)    工件呎吋:                     i)   460H610 mm                [*大]

                                                         ii)                                          200H250 mm          [*小]

                                                         iii) 0.08~3.2mm                    [厚度]

                                                   板厚小于0.08mm时建议用垫板或用托板

          3)    輸送速度:                     0.2 ~ 5米/分鐘

          4)    輸送面高度:                 925 mm&plu*n;25mm

          5)    輸送面闊度:                 700 mm                                 [*工作面寬度610mm]

          6)    行轆直徑:                    Æ22mm

          7)    行轆軸距離:                28mm

          8)    電源要求:                     3相380V AC 102kW

          9)    耗水量:                         30~40 L /min

          10)  排氣量:                         350 CFM

          11)   出入板方向:                左入板右出板                       [從機組正面視窗觀看]

          12)   排氣管數量:                 1條主排氣管

          13)   排水管數量:                2條排藥水管,1條排污水管,共3條排水管

          14)   排水方向:                    由機尾至機頭

          15)   控制電箱:                    采用觸摸屏和PLC控制