尺寸公差................................................................+0.00, -0.05mm 定向精度................................................................ 0.1° 波前畸变..................................................................λ/10 @632.8nm 相位延迟..................................................................λ/2, λ/4,
延迟精度.................................................................< λ/500 平行度....................................................................< 1 arc second *孔径...................................................................> 90% 光洁度.....................................................................20-10 崩边.......................................................................< 0.02mm |