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D*CRIPTION
The sensor element of the MS7912 consists of a *all silicon micro-machined membrane with a Pyrex gl*
mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure
sensor (MS7912A) carries a sealed vacuum reference cavity underneath the membrane whereas the differentia
sensor (MS7912D) has a hole in the Pyrex gl* at the backside of the sensor.
FEATUR*
· Uncompensated pressure sensor die · Linearity 0.05% (t*ical)
· Output Span 150mV @ 5V · Small Die Size 1.72 x 1.58mm
· Temperature Range -40°…+125° C · Low Cost, High reliability
APPLICATION
· For absolute or differential pressure sensor systems
· Engine controls
· Dive computers