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波长范围 420nm ~ 640nm
厚度测量范围 350 ~ 3
*小光斑尺寸 1.35, 0.135
目标面积 864X648 / 86.4X64.8
物镜转动架 5X(spot size 20), 50X(spot size 0.2)
测量层 1
固定样台面积 270mm(L) X 240mm(D)
Z轴再现性 ± 1
自动Z装置 Z direction Head Movement
Travel range: 50mm
Max. velocity: 50mm/s
特征
Non-destructive OSP thickness measurement
No sample preparation for fast and easy operation
Available to detect OSP coating on Cu with rough surface conditions
Auto-focusing function
3D contours results
ST4080-OSP
K-MAC科美仪器