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US9072 Series Silicon Pressure Sensor Die
Specification
Type of pressure | Absolute type or gauge type |
Dimension | 1.5mm × 1.5mm × 1.1mm |
Pressure medium | Air or non-corrosive gas |
| Min | Nominal | Max | Unit |
Excitation Voltage | -- | 5 | 10 | V |
Excitation Current | -- | 1.00 | 2.00 | mA |
Bridge Impedance | 4 | 5 | 6 | kΩ |
Span1 |
|
|
|
|
60psi | 75 | 100 | 125 | mV |
100psi | 75 | 100 | 125 | mV |
300psi | 120 | 150 | 180 | mV |
800psi | 170 | 200 | 230 | mV |
1200psi | 260 | 300 | 340 | mV |
Offset | -30 | ±10 | 30 | mV |
TC Span2 | -0.17 | -0.22 | -0.27 | %FS/℃ |
TC Offset2 | -0.08 | -0.02 | 0.08 | %FS/℃ |
Linearity3 | -0/3 | ±0.05 | 0.3 | %FS |
Hysteresis | -0.3 | ±0.1 | 0.3 | %FS |
Proof pressure |
|
| 2x | Rated Fs |
Burst pressure4 |
|
| 3x | Rated Fs |
Operating Temperature | -40 |
| 125 | ℃ |
Storage Temperature | -55 |
| 150 | ℃ |
1、Unless otherwise specified, span is measured at 5.0V Constant Voltage supply at 25℃. Sensor outputs a positive signal when diaphragm deflects downward. 2、Measured from 0℃ to 50℃ @ 5V Constant voltage excitation. 3、Defined as best straight line. 4、Maximum burst pressure up to 500psi for high pressure type (300psi) |
否
Unisense
US9072-100A
压力
聚合物
半导体
单晶
集成
模拟型
+/-0.3%F.S(典型值)(%F.S.)
-0.05%F.S/℃(%F.S.)(%F.S.)
+/-0.05%F.S(典型值)(%F.S.)