供应ASM340 德国普发PFEIFFER氦质谱捡漏仪 大抽速检漏仪

brand type

Varian VS

Leybold XL 300i

Pfeiffer ASM 340

pic

backing pump
(m3/h)

11.6

2.5

15

turbo speed
(l/s)

1.8

2.5

2.5 (Pfeiffer turbo)

min.leak rate vac.test(mabrl/s)

1.E-12

5.E-12

5.E-12

min.leak rate sni.test(mabrl/s)

1.E-08

1.E-07

5.E-09

inlet pressure(mbar)

13.3

15

25