产品详情

供应NanoCalc 反射膜厚测量系统

地区：上海 上海市
认证： 无

上海艾斯达电子

VIP会员18年

全部产品 进入商铺

NanoCalc 反射膜厚测量系统

膜厚测量 薄膜的光学特性主要有反射和干涉。NanoCalc薄膜反射测量系统可以用来进行10nm -250um的膜厚分析测量，对单层膜的分辨率为0.1nm。根据测量软件的不同，在1秒钟内可以分析单层或最多达到10层的膜厚。

 

产品特点

使用原理

最常用的两种测量薄膜的特性的方法为光学反射和投射测量、椭圆光度法测量。NanoCalc利用反射原理，通过测量宽光谱范围内的反射率曲线来进行膜厚测量。

查找n和k值

可以进行多达十层的薄膜测量，薄膜和基体材质可以是金属、电介质、无定形材料或硅晶等。NanoCalc软件包含了大多数材料的n和k值数据库，用户也可以自己添加和编辑。

 

  膜厚测量

应用

NanoCalc薄膜反射材料系统适合于在线膜厚测量，包括氧化层、中氮化硅薄膜、感光胶片及其它类型的薄膜。NanoCalc也可测量在钢、铝、铜、陶瓷、塑料等物质上的抗反射涂层、抗磨涂层等。

NanoCalc Systems Available

NANOCALC-2000-UV-VIS-NIR

Wavelength:

250-1100 nm

Thickness:

10 nm-70 um

Light source:

Deuterium and Tungsten Halogen


NANOCALC-2000-UV-VIS

Wavelength:

250-850 nm

Thickness:

10 nm-20 um

Light source:

Deuterium and Tungsten Halogen


NANOCALC-2000-VIS-NIR

Wavelength:

400-1100 nm

Thickness:

20 nm-10 um (optional 1 um-250 um)

Light source:

Tungsten Halogen


NANOCALC-2000-VIS

Wavelength:

400-850 nm

Thickness:

50 nm-20 um

Light source:

Tungsten Halogen


NANOCALC-2000-NIR

Wavelength:

650-1100 nm

Thickness:

70 nm-70 um

Light source:

Tungsten Halogen


NANOCALC-2000-NIR-HR

Wavelength:

650-1100 nm

Thickness:

70 nm-70 um

Light source:

Tungsten Halogen


NANOCALC-2000-512-NIR

Wavelength:

900-1700 nm

Thickness:

50 nm-200 um

Light source:

High-power Tungsten Halogen

For Reflectometry applications, the following items are required:

NC-2UV-VIS100-2

Bifurcated UV fiber
400 um x 2m
2x SMA connectors
Flexible metal jacketing

NC-STATE

Single point reflection measurement for non transparent samples

Step-Wafer 5 Steps 0-500 mm, calibrated 4"

If using a microscope, the following items are also needed:

NC-7UV-VIS200-2

Reflection probe for application microscopy with MFA-C-Mount

Step-Wafer 5 Steps 0-500 mm, calibrated 4"

NanoCalc Specifications

Angle of incidence:

90°

Number of layers:

3 or fewer

Reference measurement needed:

Yes (bare substrate)

Transparent materials:

Yes

Transmission mode:

Yes

Rough materials:

Yes

Measurement speed:

100 milliseconds to 1 second

On-line possibilities:

Yes

Mechanical tolerance (height):

With new reference or collimation (74-UV)

Mechanical tolerance (angle):

Yes, with new reference

Microspot option:

Yes, with microscope

Vision option:

Yes, with microscope

Mapping option:

6" and 12" XYZ mapping tables

Vacuum possibilities:

Yes

型号/规格

NanoCalc 反射膜厚测量系统

品牌/商标

海洋光学

量程

10NM-250NM

价格

198760.0