NOVELLUS去胶机配件 3510 PN：16092-01 plate heated L3510/PEP3510 A-3758

NOVELLUS 3510 PN：16092-01 plate heated L3510/PEP3510    NOVELLUS 3510 PN16092-01 plate heated L3510/PEP3510  A-3758

GasonicsPEP3510 resist asher Main body set up for 8 'wafer configuration information：

1.S/N：M982090  and  M982100

2.Vintage: 1998

3.SECS/GEM interface

4.2x Open cassette

5.Dual Blade Yaskawa Robot

6.Left/Right coolers

7.Left Module: PEP3510A/A(L)

8.Right Module: PEP3510A/A(R)

9.Quartz process kit

10.Standard Platen

11.MKS600 series Pressure controller

12.IBM Computer

13.Microwave Power supply: Astex(2000W)

14.2x Dry pumps