APPLIED MATERIALS Endura 5500 HP System, 8

全新订货4-6个月   AMAT / APPLIED MATERIALS Endura 5500 HP System, 8"
Process: IMP BM
Orienter / Degas
(2) Standard SMIF handler system
(4) Dry pumps
(2) Compressors
(2) Generator racks
NESLAB Chiller
AC Box
Thin film fab section
NESLAB Chiller


Wafer shape: notch
SMIF Interface


Chamber B information:
Cooldown chamber
CTI-CRYOGENIC On board pump
TRIVIA LEYBOLD Rough pump
VAT Valve
GRANVILLE PHILIPS Convection


Power supply:
Line frequency: 50 Hz
Line voltage: 200/208 V
Line amperage: 320 A